Thermal effects in precision systems

Manufacturing Micro system technology MEMS/NEMS Optics
Mikroniek 2010-2 by Ronald Lamers 2 April 2012

In precision engineering, thermal effects have always been important in reaching high precision. Yet, over the years little attention has been given to this subject. Therefore, Mikrocentrum, in cooperation with Tegema Group, decided to organise a second seminar on thermomechanics, following the first one held four years ago, which attracted considerable interest. This year, the seminar focused on the control of thermal behaviour of precision systems. Once again, attendance was above average, underlining the topicality and relevance of this issue.


References

Our DSPE chairman Hans Krikhaar…

๐—ช๐—ฒ ๐—ฎ๐—ฟ๐—ฒ ๐—ฝ๐—ฟ๐—ผ๐˜‚๐—ฑ ๐˜๐—ผ ๐—ฎ๐—ป๐—ป๐—ผ๐˜‚๐—ป๐—ฐ๐—ฒ ๐˜๐—ต๐—ฎ๐˜ ๐——๐—ฆ๐—ฃ๐—˜ ๐—ฃ๐—ฟ๐—ฒ๐˜€๐—ถ๐—ฑ๐—ฒ๐—ป๐˜ ๐—›๐—ฎ๐—ป๐˜€ ๐—ž๐—ฟ๐—ถ๐—ธ๐—ต๐—ฎ๐—ฎ๐—ฟ ๐—ต๐—ฎ๐˜€ ๐—ฟ๐—ฒ๐—ฐ๐—ฒ๐—ถ๐˜ƒ๐—ฒ๐—ฑ ๐—ฎ ๐—š๐—ฒ๐—ฟ๐—ฎ๐—ฟ๐—ฑ & ๐—”๐—ป๐˜๐—ผ๐—ป ๐—›๐—ถ๐—ด๐—ต ๐—ง๐—ฒ๐—ฐ๐—ต ๐—ฆ๐˜๐—ฎ๐—ฟ ๐—”๐˜„๐—ฎ๐—ฟ๐—ฑ ๐Ÿฎ๐Ÿฌ๐Ÿฎ๐Ÿฒ!

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Lunch lecture February hosted by…

Title: Piezoelectric wafer stage โ€“ for electron beam inspection systems

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Sensitivity analysis in Opto-Mechanical System…

As a mechatronics engineer at VDL ETG Technology & Development in Almelo (NL), Leon Nijenhuis got involved with opto-mechanics when working on aerospace projects. One of his duties was the design of an alignment tool for laser satellite communication.

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