SMART DISC − application in an ASML wafer stepper

Electronics Medical technology Precision-technology
philips by THEO J.A. DE VRIES, JAN HOLTERMAN, MARINUS P. KOSTER, BASTIAAN S.H. JANSEN 8 May 2007
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References

QUADRA: metrology for the ongoing…

The semiconductor roadmap is currently fuelled by innovations along three trends

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Damping position-dependent parasitic vibrations

Parasitic resonances are often limiting the performance of precision machinery.

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Reducing noise and vibrations

Acoustics play a critical role in product development across various engineering domains, significantly impacting both functionality and user experience.

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