Nauwkeurig positioneren met piezo-electrische elementen

Nauwkeurig positioneren is nodig in allerlei vakgebieden: IC-fabricage, oppervlakte-onderzoek en materiaalonderzoek. In dat laatste gebied past men scanning- en transmissie-elektronenmicroscopen toe, van Nederlands fabrikaat! Het gaat hier om tweedimensionaal positioneren, maar in de toekomst zal er bij DNA-onderzoek en -bewerking wellicht driedimensionaal gepositioneerd moeten worden.

Download Mikroniek 5-1997

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References

Lunch Lecture April hosted by…

Theme: Concept optimization of system dynamics of a lithography tool.

Historical view on determinism and…

Paralleling the historical beginnings of modern science, assessing and addressing variation in physical systems constitutes the foundation of precision engineering. Tycho Brahe gave us the measurement data to analyse the heavens.

Sensor for picometer-scale positioning in…

As technology reaches the atomic and quantum scale, sub-nanometer motion control is no longer optional – it is a necessity, often in vacuum environments where even the smallest disturbances are effectively suppressed.