Nauwkeurig positioneren met piezo-electrische elementen

Micro system technology MEMS/NEMS Precision-technology
Mikroniek 5-1997 by F.Zuurveen 27 April 2006

Nauwkeurig positioneren is nodig in allerlei vakgebieden: IC-fabricage, oppervlakte-onderzoek en materiaalonderzoek. In dat laatste gebied past men scanning- en transmissie-elektronenmicroscopen toe, van Nederlands fabrikaat! Het gaat hier om tweedimensionaal positioneren, maar in de toekomst zal er bij DNA-onderzoek en -bewerking wellicht driedimensionaal gepositioneerd moeten worden.


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