Nauwkeurig positioneren met piezo-electrische elementen

Micro system technology MEMS/NEMS Precision-technology
Mikroniek 5-1997 by F.Zuurveen 27 April 2006

Nauwkeurig positioneren is nodig in allerlei vakgebieden: IC-fabricage, oppervlakte-onderzoek en materiaalonderzoek. In dat laatste gebied past men scanning- en transmissie-elektronenmicroscopen toe, van Nederlands fabrikaat! Het gaat hier om tweedimensionaal positioneren, maar in de toekomst zal er bij DNA-onderzoek en -bewerking wellicht driedimensionaal gepositioneerd moeten worden.


References

Order of frictions and stiffnesses…

For lumped systems consisting of different frictions and stiffnesses, there has been confusion in literature about hysteresis curves and virtual play for many decades.

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In mid-April, the second edition of the Manufacturing Technology Conference and the fifth edition of the Clean Event were held together, for the first time, at the Koningshof in Veldhoven (NL).

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Bringing particles to light

Particle contamination monitoring and cleanliness control are fundamental to micromanufacturing processes across diverse industries to achieve cost-effective production of high-quality and reliable microscale devices and components.

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