Free Form Fluid Jet Polishing with In-proces Monitoring

TNO TPD is currently making strong headway on a project, for which the main objective is to combine two novel technologies, Fluid Jet Polishing (FJP) and Interferometric In-Process Measurement (IIPM), on a 7 axis machine bed. The machine will allow corrective free form shaping and polishing to less than 60nm PV (shape) and 1nm RMS (roughness). TNO TPD, together with interested parties, will investigate a range of market applications in the near future, using the machine as an experimental test-bed.