Dynamic characterization of microresonators

Mechanics Micro system technology MEMS/NEMS Sensors
Mikroniek 2010-2 by Warner Venstra 2 April 2012

A compact tool, based on a magnetomotive transduction technique at room temperature and pressure, was developed for the characterization of the dynamic properties of micromechanical systems. Using a permanent magnet that generates up to 2.5 Tesla in an adjustable gap, mechanical resonances at megahertz frequencies can be measured. The driving force is strong enough to drive microresonators into nonlinearity, and to detect microresonators vibrating in liquids.


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