Driedimensionaal meten van microstructuren

Micro system technology MEMS/NEMS Sensors
Mikroniek 3-2002, F&M Mechatronik 1-2/2002 by B. Kagerer 27 April 2006

Klein, kleiner, ultraklein.. allerkleinst? Miniaturisering in micro-elektronica, microsysteemtechniek en in de automobieltechniek stelt steeds hogere eisen aan de kwaliteit van oppervlakten. Voor het meten van ruwheid en microgeometriekan gebruik worden gemaakt van optische concepten, waarbij deze geschikt gemaakt zijn voor de hoge eisen die de moderne kwaliteitsbewaking aan precisiemeetinstrumentarium stelt.


References

Order of frictions and stiffnesses…

For lumped systems consisting of different frictions and stiffnesses, there has been confusion in literature about hysteresis curves and virtual play for many decades.

Read more
Make it clean

In mid-April, the second edition of the Manufacturing Technology Conference and the fifth edition of the Clean Event were held together, for the first time, at the Koningshof in Veldhoven (NL).

Read more
Bringing particles to light

Particle contamination monitoring and cleanliness control are fundamental to micromanufacturing processes across diverse industries to achieve cost-effective production of high-quality and reliable microscale devices and components.

Read more