Active damping within high-precision machines

IOP by Theo J.A. de Vries 27 April 2006

The Drebbel Institute of Mechatronics at the Universitry of Twente is conducting research on active damping of vibrations within high-precision machine frames. Since badly damped vibrations often limit the attainable machine accuracy, this is of great interest for both users and suppliers of high-precision measurement and production machines. The use of structural elements-dubbed Smart Discs-has shown very good results in waffer steppers, for instance. ‘We now have a recipe for active damping as a design principle.’ []


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