6-DoFs MEMS-based precision manipulator

Combining Design Principles, a mature design philosophy for creating precision machines, and MEMS fabrication, a technology for miniaturization, could lead to micro systems with deterministic behavior and accurate positioning capability. However, in MEMS design trade-offs need to be made between fabrication complexity and design principle requirements. Here a micro-mechatronic design of a Stewart Platform, a six Degrees-of-Freedom MEMS-based Precision Manipulator, is presented.