6-DoFs MEMS-based precision manipulator

Combining Design Principles, a mature design philosophy for creating precision machines, and MEMS fabrication, a technology for miniaturization, could lead to micro systems with deterministic behavior and accurate positioning capability. However, in MEMS design trade-offs need to be made between fabrication complexity and design principle requirements. Here a micro-mechatronic design of a Stewart Platform, a six Degrees-of-Freedom MEMS-based Precision Manipulator, is presented.

Download Mikroniek 2 2008

Back to overview

We use cookies to improve your experience on our website

References

Professional education program (Microcredentials)

The aim of the DSPE professional education program is to equip professionals with the specialized knowledge, skills, and competencies needed to design and realize innovative (high tech) systems.

Techcafé met als thema Manufacturability

Dé plek om ongedwongen nieuwe contacten op te doen én onder het genot van een borrel en bitterbal te sparren over tech onderwerpen.

Marriage of opto-mechatronics and electron…

This year’s DSPE Opto-Mechatronics Symposium attracted some 100 participants from academia and industry, all of whom seized the opportunity for networking, meeting technical peers, and visiting an interesting small-scale exhibition.