NEWS 15 December 2024

Working with LEM and FEM for mitigating thermal drift

The phenomenon of thermal drift compromises precision as a result of thermal expansion or contraction of components, caused by small variations in temperature.

Various mitigation strategies exist to minimise the effect of thermal drift on precision. Through modelling of thermal systems, the magnitude of thermal drift and the effectiveness of mitigation strategies can be predicted, using for example the lumped-element method (LEM) or the finite-element method (FEM), as described in this Mikroniek article. (Image courtesy of Demcon multiphysics)

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References

Lunch Lecture April hosted by…

Theme: Concept optimization of system dynamics of a wafer metrology tool

Historical view on determinism and…

Paralleling the historical beginnings of modern science, assessing and addressing variation in physical systems constitutes the foundation of precision engineering. Tycho Brahe gave us the measurement data to analyse the heavens.

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As technology reaches the atomic and quantum scale, sub-nanometer motion control is no longer optional – it is a necessity, often in vacuum environments where even the smallest disturbances are effectively suppressed.