Rotating MagLev sample manipulator

Current systems typically use a set of stacked stages based on piezo or stepper motors. To enable higher throughput and performance, MI-Partners has developed a magnetically levitated sample stage. The stage can be controlled in six degrees of freedom (6-DoF), with an infinite rotation around the vertical axis (z-axis) and a stroke of 3 mm along the x-, y- and z-axis. The stage is based on a novel electromagnetic actuator and positioning metrology system. This Mikroniek article presents its development and relisation. (Image courtesy of MI-Partners)