Piezoelectric thin-film characterization for MEMS

Micro system technology MEMS/NEMS Precision-technology Sensors
Mikroniek 2010-4 by Klaus Prume et al. 8 April 2012

Principles of electrical and mechanical characterization of piezoelectric thin films are discussed. Both large- and small-signal measurements are presented for AlN (aluminum nitride) and PZT (lead zirconate titanate) films. Additionally, precision aspects and tolerances are addressed for typical measurement set-ups such as in Double-Beam Laser Interferometry and four-point bending test methods. To conclude, the authors discuss possibilities of wafer level vs. single test structure characterization.


References

May 30 DSPE Knowledge day…

Please be invited to the upcoming DSPE Knowledge Day at Settels Savenije Eindhoven.

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Lunch lecture May hosted by…

Precision in roll -2- roll electronics

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YPN visited Kulicke & Soffa…

The Young Precision Network (YPN) - part of the DSPE community - organises events for young professionals and students. On Thursday February 1st, YPN organised a visit to Kulicke & Soffa in Eindhoven.

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