Design, Realization and Testing of NANOMEFOS

Mechanics Optics Precision-technology
Mikroniek 2008-5 by Rens Henselmans 11 May 2010

Freeform optics offer many advantages over spherical optics. The applicability of conventional metrology methods is however limited for these surfaces. In the NANOMEFOS project a new non-contact measurement machine has therefore been designed, realized and tested. This PhD project is now nearing completion and the first test results show nanometer level reproducibility and promising measurement uncertainty.


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