Design, Realization and Testing of NANOMEFOS

Mechanics Optics Precision-technology
Mikroniek 2008-5 by Rens Henselmans 11 May 2010

Freeform optics offer many advantages over spherical optics. The applicability of conventional metrology methods is however limited for these surfaces. In the NANOMEFOS project a new non-contact measurement machine has therefore been designed, realized and tested. This PhD project is now nearing completion and the first test results show nanometer level reproducibility and promising measurement uncertainty.


References

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