Contactloos meten met behulp van opto-elektronische sensoren en laterale foto-effect detectoren

Micro system technology MEMS/NEMS Precision-technology
Mikroniek 3-2004 by Frank Godschalk, C.S. Kooijman 20 February 2007

De ontwikkelingen richting de nanotechnologie gaan in hoog tempo. Om op nanometerniveau te meten is positionering nodig op submicron niveau. Met behulp van onder andere optische sensoren is dit mogelijk omdat ze in ieder geval contactloos werken. Er zijn kant en klare sensoren te koop, maar zelf bouwen kan ook. De keuze om te meten met PSD’s heeft unieke voordelen ten opzichte van andere middelen. In het nu volgende artikel gaan we dieper in op de opto-electronische sensoren en laterale fotoeffect-detectoren.

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