NEWS 2 February 2021

Wafer-handler systems engineering and magnetic bearing design

A systems engineering approach to the design of a wafer handler is presented in this Mikroniek article, starting with an introduction to wafer handling, followed by the corresponding requirements and...

Julie van Stiphout - Sassen

A systems engineering approach to the design of a wafer handler is presented in this Mikroniek article, starting with an introduction to wafer handling, followed by the corresponding requirements and lastly common system architectures. Regarding wafer-handling robots, the conclusion is that the moving robot mass increases when contamination requirements become more stringent. Moreover, robotic concepts containing a linear stroke can improve stiffness and reduce mass at the cost of contamination-sealing complexity. To conclude, the design and realisation of a low-end, low-cost magnetic bearing for high-cleanliness robotic applications is discussed.


References

Agile systems engineering approach towards…

In the semiconductor industry, Moore’s law comes with increasing and complex demands and the need for advanced process control metrology. Nearfield Instruments fulfils these needs with their high-throughput scanning probe...

Read more
Mikroniek April: Thermal issues and…

The forthcoming Mikroniek issue, click here for a first impression, will appear on 1 July. It is in part dedicated to mechatronic system design & control, featuring a treatise on...

Read more
Lunch Lecture December hosted by…

“Hope for the best but prepare for the worst”End-stop design challenges in Mechatronic Systems. By Ronald Plak, Mechanical System Architect at Sioux Technologies. Do you dare to let your design...

Read more