NEWS 29 October 2024

Nonlinear control takes over?

The ever increasing demands on precision and throughput in semiconductor manufacturing machines challenge today's linear control designs.


For that reason, the industry is slowly starting to witness a shift toward more flexible, but also more complex nonlinear control methods. This Mikroniek article discusses the use of nonlinear integrators that can boost the performance of high-precision motion systems such as wafer scanners and wire bonders. (Image courtesy of ASMPT)


References

Lunch Lecture April hosted by…

Theme: Concept optimization of system dynamics of a lithography tool.

Read more
Historical view on determinism and…

Paralleling the historical beginnings of modern science, assessing and addressing variation in physical systems constitutes the foundation of precision engineering. Tycho Brahe gave us the measurement data to analyse the heavens.

Read more
Sensor for picometer-scale positioning in…

As technology reaches the atomic and quantum scale, sub-nanometer motion control is no longer optional – it is a necessity, often in vacuum environments where even the smallest disturbances are effectively suppressed.

Read more