NEWS 12 January 2019

Mikroniek: Wafer-handler systems engineering and magnetic bearing design

A systems engineering approach to the design of a wafer handler is presented in this Mikroniek article, starting with an introduction to wafer handling, followed by the corresponding requirements and...

DSPE

A systems engineering approach to the design of a wafer handler is presented in this Mikroniek article, starting with an introduction to wafer handling, followed by the corresponding requirements and lastly common system architectures. Regarding wafer-handling robots, the conclusion is that the moving robot mass increases when contamination requirements become more stringent. Moreover, robotic concepts containing a linear stroke can improve stiffness and reduce mass at the cost of contamination-sealing complexity. To conclude, the design and realisation of a low-end, low-cost magnetic bearing for high-cleanliness robotic applications is discussed.


References

Successful first DSPE Optics &…

Topics included the design and manufacturing of optics as well as optomechanics, and their implementation in optomechatronic systems. With top-class speakers from the world’s leading companies, over 110 delegates and...

Read more
Aquatic Solutions Conference 2015

A conference on electrical actuated underwater applications.   The Aquatic Solutions Conference (ASC) is an international, independent conference dedicated to advance the professional and scientific understanding of underwater solutions, focusing...

Read more
Precision Pictures

DSPE wants to make Precision Technology visible to all interested parties, so that we can disseminate the technology, and thus keep the knowledge of this field as high as possible....

Read more