NEWS 12 January 2019

Mikroniek: Wafer-handler systems engineering and magnetic bearing design

A systems engineering approach to the design of a wafer handler is presented in this Mikroniek article, starting with an introduction to wafer handling, followed by the corresponding requirements and...

DSPE

A systems engineering approach to the design of a wafer handler is presented in this Mikroniek article, starting with an introduction to wafer handling, followed by the corresponding requirements and lastly common system architectures. Regarding wafer-handling robots, the conclusion is that the moving robot mass increases when contamination requirements become more stringent. Moreover, robotic concepts containing a linear stroke can improve stiffness and reduce mass at the cost of contamination-sealing complexity. To conclude, the design and realisation of a low-end, low-cost magnetic bearing for high-cleanliness robotic applications is discussed.


References

Mikroniek October: DSPE Conference report,…

The October issue of Mikroniek, click here for a first impression, which has recently appeared, is loaded with information. It contains a report of the DSPE Conference on Precision Mechatronics...

Read more
High – Tech Systems digital…

Meet new people from your field of work, expand your network or catch up and chatter with acquaintances like you are at a real event.  Next week, on 25 March,...

Read more
Mikroniek: Large dynamic range atomic…

The second part of the Optics Week, on 1-3 October 2019, was filled with the Optomechanical system design course.

Read more