NEWS 28 April 2022

Nanometer precision in practice

In 2020, Nobby Assmann won a Zeiss #measuringhero Award for the smallest measured object on a coordinate measuring machine: 0.4 mm x 0.4 mm x 0.03 mm.


The next year, he won another award, this time for the smoothest surface, with a surface roughness of Ra 540 pm and Rz 3.1 nm. The surface was finished by lapping, flat polishing and chemical mechanical planarisation; three extremely precise processes. This Mikroniek article descibes what exactly are these processes and what is it that drives this technician. (Image courtesy of Assmann Verspaningstechniek)


References

Lunch Lecture April hosted by…

Theme: Concept optimization of system dynamics of a lithography tool.

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Historical view on determinism and…

Paralleling the historical beginnings of modern science, assessing and addressing variation in physical systems constitutes the foundation of precision engineering. Tycho Brahe gave us the measurement data to analyse the heavens.

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Sensor for picometer-scale positioning in…

As technology reaches the atomic and quantum scale, sub-nanometer motion control is no longer optional – it is a necessity, often in vacuum environments where even the smallest disturbances are effectively suppressed.

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