NEWS 8 September 2022
Minimising spherical aberrations
Temperature-controlled optical profilometry has historically been a difficult procedure due to imaging issues caused by spherical aberrations.
Linkam Scientific Instruments and Sensofar Metrology demonstrate an experimental set-up in which these problems have been minimised, as described in this Mikroniek article. Using Linkam’s precision temperature control chamber with Sensofar’s Linnik objective lens allows accurate measurement of 3D topographic profiles of nanoscale materials. As an example, the changes in the topography of silicon wafers as they evolve with temperatures from 20 up to 380 °C are presented. (Image courtesy of Sensofar)