NEWS 19 December 2021

Mikroniek December 2021: Contamination

The December issue of Mikroniek features the theme of Contamination. The main feature is the ACCESS project: Active Contamination Control for Equipment and Substrates.


In this project, VDL ETG and Eindhoven University of Technology work together as a multidisciplinary team, to deepen the fundamental understanding of generation, transport and removal of particle contamination. In addition, several articles present solutions for measuring contamination (in vacuum). The issue – click here for an impression – also runs several reports, of the DSPE Knowledge Day Engineering for Contamination Control, the Precision Fair 2021, and the Gas Bearing Workshop 2021. (Combined images, courtesy of Fastmicro and TNO)


References

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Paralleling the historical beginnings of modern science, assessing and addressing variation in physical systems constitutes the foundation of precision engineering. Tycho Brahe gave us the measurement data to analyse the heavens.

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Sensor for picometer-scale positioning in…

As technology reaches the atomic and quantum scale, sub-nanometer motion control is no longer optional – it is a necessity, often in vacuum environments where even the smallest disturbances are effectively suppressed.

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