NEWS 19 December 2021

Mikroniek December 2021: Contamination

The December issue of Mikroniek features the theme of Contamination. The main feature is the ACCESS project: Active Contamination Control for Equipment and Substrates.


In this project, VDL ETG and Eindhoven University of Technology work together as a multidisciplinary team, to deepen the fundamental understanding of generation, transport and removal of particle contamination. In addition, several articles present solutions for measuring contamination (in vacuum). The issue – click here for an impression – also runs several reports, of the DSPE Knowledge Day Engineering for Contamination Control, the Precision Fair 2021, and the Gas Bearing Workshop 2021. (Combined images, courtesy of Fastmicro and TNO)


References

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