Mikroniek December 2021: Contamination

The December issue of Mikroniek features the theme of Contamination. The main feature is the ACCESS project: Active Contamination Control for Equipment and SubstrateS. In this project, VDL ETG and Eindhoven University of Technology work together as a multidisciplinary team, to deepen the fundamental understanding of generation, transport and removal of particle contamination. In addition, several articles present solutions for measuring contamination (in vacuum). The issue – click here for an impression – also runs several reports, of the DSPE Knowledge Day Engineering for Contamination Control, the Precision Fair 2021, and the Gas Bearing Workshop 2021. (Combined images, courtesy of Fastmicro and TNO)