NEWS 13 August 2020

Mikroniek April 2019: Thermal control

The April issue of Mikroniek features the theme of thermal control. Today, thermomechanics is crucial for successfully designing precision systems, especially optical systems – DSPE runs a Special Interest Group...

DSPE

The April issue of Mikroniek features the theme of thermal control. Today, thermomechanics is crucial for successfully designing precision systems, especially optical systems – DSPE runs a Special Interest Group on this subject. Thermal loads induce drift, which can ‘ruin’ precision. Hence, thermal control is required, as described by Philips Innovations Services, MI-Partners, and TU/e with Thermo Fisher (on an Advanced Thermal Control Consortium project). Another highlight is Zygo Corporation’s new multi-axis, heterodyne encoder system for extremely demanding applications. Click here for a first impression.


References

Precision education at a high…

Joris Looman, Lead Design Engineer Opto-Mechanics at ASML, has obtained the Bronze ECP2 certificate for courses certified in the ECP2 programme, the European certified precision engineering course programme.   ECP2...

Read more
Mikroniek: Wafer-handler systems engineering and…

A systems engineering approach to the design of a wafer handler is presented in this Mikroniek article, starting with an introduction to wafer handling, followed by the corresponding requirements and...

Read more
Large dynamic range atomic force…

In semiconductor manufacturing, the shrink following Moore’s law requires ever tighter overlay and registration between the different (material) layers. For accurately characterising this overlay and registration, TNO has developed a...

Read more