Lunch lecture February hosted by TU/e
Title: Piezoelectric wafer stage – for electron beam inspection systems
Electron beam inspection systems are vital in the semiconductor industry, enabling precise nanoscale measurements and defect detection. These systems scan a wafer’s surface with a focused electron beam, producing high-resolution images. Their accuracy, however, is highly sensitive to electromagnetic interference, making actuator selection critical. Conventional Lorentz actuators provide smooth motion but generate residual magnetic fields, which require expensive shielding. In his PhD research, Ron de Bruijn investigates piezoelectric actuators as an alternative that avoids electromagnetic interference. While promising, their inherent stiffness makes them prone to transmitting disturbances. To overcome this limitation, a novel wafer stage architecture is proposed.
Spreker: : Ron de Bruijn
Company: Assistant Professor TU/e
Date: February 2 2026
Time: 12:02pm
Location: Teams
Please send an email to info@dspe.nl if you are interested in following this lecture.
Normally every first monday of the month DSPE organizes for their members a lunch lecture. Each time there is a different topic that a speaker is going to talk about. Due to the holiday period we will organize this lecture in the second week.
Questions can be asked after the 25 minutes presentation. If you want to keep informed about these lunch lectures please send an email to info@dspe.nl