NEWS 13 January 2023

Lunch Lecture February hosted by KNS Liteq

Design, Integration and Calibration of a Wafer Edge Protection Module in Lithographic Equipment


The LITEQ500 is a lithographic tool dedicated to the Advanced Packaging process. In addition to the main system functions to expose patterns on a wafer, other dedicated wafer edge processing functionalities have been developed. These wafer edge processing modules are typically used to create a circular pattern on the outer circumference of the wafer. This pattern enables an electrical contact on the edge of the wafer that is needed in the plating process to grow copper on the wafer surface.

The speakers will be:

  • Jeroen de Boeij, System Architect / R&D manager, KNS Liteq
  • Peter van der Krieken, Application Engineer, KNS Liteq

This teams meeting will start at 12:02pm on February 6 2023

Please send an email to info@dspe.nl if you are interested in this Lunch lecture.


References

Jan-Pieter Rijstenbil (TU Eindhoven) receives…

Prize for careful process analysis and early validation. During the 23rd edition of the Precision Fair in Den Bosch (NL), the Wim van der Hoek Award was presented under the auspices of DSPE (Dutch Society for Precision Engineering).

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Bert Brals (Sioux Technologies) receives…

Creative inventor, collaborating foreman and true teacher. During the 23rd edition of the Precision Fair, the Rien Koster Award was presented for the tenth time under the auspices of DSPE (Dutch Society for Precision Engineering).

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Wim van der Hoek Award…

This year, the jury has received four nominations for students who applied existing or new design principles in their graduation work in an exciting manner.

Read more