DSPE Symposium 2024
Following up on earlier successful editions, we are organizing the 6th edition of the DSPE Symposium on Opto-mechatronics for October 8, 2024 at Mikrocentrum in Veldhoven. Please register now!
For this edition, we have chosen the theme ‘Opto-mechatronics meets Electron Optics’
Opto-mechatronics is used in a wide variety of optical systems. In the previous editions, the focus of the Opto-mechatronics symposium was mainly on optical systems using light, such as optical microscopes and optical lithography systems based on light sources, mirrors and lenses.
In this edition, we want to focus on systems based on electron beam and ion beam optics. These complex opto-mechatronics systems with great resolving power, are used in multiple applications, like electron-microscopes, electron or ion beam lithography systems and tools for pico-meter level ion beam figuring.
Topics to be considered are single and multibeam technology, alignment strategies for electron optics, electromagnetic shielding, cryogenic and vacuum requirements, thermal stability, dynamic performance, and material selection.
Chariman:
Olivier Rainaut, Director R&D Thermo Fisher Scientific
Nicolae Catalin Podaru
Thermo Fisher
Electron microscopy: Principles, Electron Optics and Operating Modes
Diederik Maas
TNO
Aberration correction for Low-Voltage SEM in an Optomechatronical context
Maurits Weeda
ASML
The application of an electron optics system in a wafer inspection machine from ASML
Wilco Zuidema
Delmic
Optical Systems in a Multi-Beam Electron Microscope
Jacob Hoogenboom
TU Delft
Integrated microscopy with coincident electron, photon, and ion beams
Dr. Aditya Narayanan
Raith
Level sensing in e-beam lithography
René Cartaya López
Zeiss
Integration of Laser Interferometry for Vibration Sensing in Scanning Electron Microscopy
Pleun Dona
Thermo Fisher
Laser Phase Plate and its Application in Transmission Electron Microscopy
Patrick de Jager
BIRDS
Groundbreaking technology to solve some of humanities toughest challenges
With kind regards and looking forward to meet you in October 2024,
The organizing committee DSPE Opto-mechatronics Symposium:
Cor Ottens, Pieter Kappelhof, Stefan Bäumer, Hans Vermeulen, Nandini Bhattacharya, Julie van Stiphout
