NEWS 29 September 2025

DSPE Conference on Precision Mechatronics Awards 2025

Congratulation to Dieter Lambregts, Kevin Looman and Bas Huisman


Best Poster Award went to Dieter Lambregts (ASML, TNO), on the development of a Fast-Steering Mirror, a small device that enables a big leap in EUV power in 1um Source Systems. He showed very clear the challenge of the full cycle of design, realization, integration and even shipment to customers.

Best demonstration Award went to Bas Huisman, (PhD Eindhoven University of Technology, ASML), on the development of a prototype of a deformable wafer table. His demo was realized in a short timeframe, and very well presented and explained. A really an impressive experiment according to the jury.

Best presentation Award went to Kevin Looman (PhD Eindhoven University of Technology, Prodrive) on the design and realization of a hybrid reluctance-based fast steering mirror with linear current-force relation and stiffness compensation. Very clear and structured presentation, brought to the audience in a relaxed way.

From left to right: Jury chairman Jan van den Brink, Kevin Looman, Bas Huisman, Dieter Lambregts, Conference chairman Marc Vermeulen, Eventmanager Annemarie Schrauwen

To get back into the mood of the conference, here you can find the AFTERMOVIE

The next edition of the conference on Precision Mechatronics will be in 2027. Hope to see you there.


References

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