Combining sensors and interferometers for nanometrology

an optical sensor or a microprobe, can be used to perform high-precision free-form surface measurements as well as three-dimensional scanning and tactile measurements on microcomponents, as described in this Mikroniek article. Uncertainties in the nanometer range are achievable, and the use of laser interferometers for position measurement allows traceability of measurements for the purpose of sensor calibration. (Image courtesy of SIOS Meßtechnik)