Bouncing stage concept for precision positioning

This Mikroniek article introduces the bouncing stage concept, where an additional auxiliary stage exchanges kinetic energy with the positioning stage to decouple throughput from actuator-force limits in applications with repetitive setpoints, such as photolithography scanners. The resulting non-conventional force setpoints are analysed in the frequency domain, linking their spectral content to internal structural modes, cable and hose dynamics, and short-stroke process sensitivity in order to quantify their impact on positioning accuracy. (Image source: ASML)