NEWS 19 December 2021

Active contamination control for equipment and substrates

High-end manufacturing equipment has to support increasing levels of cleanliness. First-tier high-tech system supplier VDL ETG is pro-actively developing capabilities in product design as well as in production process design...

Julie van Stiphout - Sassen

High-end manufacturing equipment has to support increasing levels of cleanliness. First-tier high-tech system supplier VDL ETG is pro-actively developing capabilities in product design as well as in production process design to support increasing requirements on cleanliness. Where knowledge gaps exist, VDL ETG supports research to further the state-of-art, for example in the ACCESS project: Active Contamination Control for Equipment and SubstrateS. In this project, VDL ETG and Eindhoven University of Technology (TU/e) work together as a multidisciplinary team, to deepen the fundamental understanding of generation, transport and removal of particle contamination. This Mikroniek article presents an overview of the project.

VDL ETG development lab. (Photo: Bram Saeys)

References

Merging systems architecture and project…

In recent years, systems engineering (SE) is becoming more important in the Dutch high-tech equipment industry. Increasing system complexity and increasing team sizes put more emphasis on the explicit coordination...

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Mikroniek September 2015: focus on…

The forthcoming September issue of Mikroniek, click here for a preview, is in part dedicated to the first DSPE Optics and Optomechatronics Week (28 September – 2 October 2015). Naturally,...

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Mikroniek December 2021: Contamination

The December issue of Mikroniek features the theme of Contamination. The main feature is the ACCESS project: Active Contamination Control for Equipment and SubstrateS. In this project, VDL ETG and...

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