Lunch lecture February hosted by KNS Liteq
Design, Integration and Calibration of a Wafer Edge Protection Module in Lithographic Equipment
About this event
The LITEQ500 is a lithographic tool dedicated to the Advanced Packaging process. In addition to the main system functions to expose patterns on a wafer, other dedicated wafer edge processing functionalities have been developed. These wafer edge processing modules are typically used to create a circular pattern on the outer circumference of the wafer. This pattern enables an electrical contact on the edge of the wafer that is needed in the plating process to grow copper on the wafer surface.
The speakers will be:
- Jeroen de Boeij, System Architect / R&D manager, KNS Liteq
- Peter van der Krieken, Application Engineer, KNS Liteq
This teams meeting will start at 12:02pm on February 6 2023
Please send an email to info@dspe.nl if you are interested in this Lunch lecture.
The Netherlands
References
Upon his retirement from ASML, Martin van den Brink was appointed honorary member of DSPE.
Read moreMaking crucial design decisions early in the concept phase of a project, may lead to severe cost and time overruns when these decisions are based on assumptions and/or incomplete knowledge.
Read moreAstronomers use deformable mirrors to improve the image of a telescope by correcting for the optical distortions caused by atmospheric turbulence.
Read more