Ontwikkelingen en applicaties in de Micro Syteem Technologie

Micro system technology MEMS/NEMS Precision-technology
Mikroniek 5-1997 by J.Fluitman 27 April 2006

Het vakgebied MST wordt gestimuleerd door twee ontwikkelingen, die alkaar wederzijds beinvloeden. De eerste is de drang naar miniaturisatie en de tweede is de beschikbaarheid van nieuwe technologieen. Op beide ontwikkelingen zal ik kort ingaan.


References

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