Ontwikkelingen en applicaties in de Micro Syteem Technologie

Het vakgebied MST wordt gestimuleerd door twee ontwikkelingen, die alkaar wederzijds beinvloeden. De eerste is de drang naar miniaturisatie en de tweede is de beschikbaarheid van nieuwe technologieen. Op beide ontwikkelingen zal ik kort ingaan.

Download Mikroniek 5-1997

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References

Lunch Lecture April hosted by…

Theme: Concept optimization of system dynamics of a lithography tool.

Historical view on determinism and…

Paralleling the historical beginnings of modern science, assessing and addressing variation in physical systems constitutes the foundation of precision engineering. Tycho Brahe gave us the measurement data to analyse the heavens.

Sensor for picometer-scale positioning in…

As technology reaches the atomic and quantum scale, sub-nanometer motion control is no longer optional – it is a necessity, often in vacuum environments where even the smallest disturbances are effectively suppressed.