Next Genration Lithography, battle for the square nanometer

The chip industry is moving rapidly towards the limit of current chip machine technology, the so-called wafersteppers. The upcoming generation of machines that work with light wavelengths of 157 nanometres will be followed by a vacuum. Literally. Researchers at TNO are working with ASML, Philips and Zeiss on technology in a vacuum that will enable the enormous step towards extreme ultraviolet light with a wavelength of 13.5 nanometres. The aim is to create a working prototype by the end of 2003.