EVENT 25 January 2024

DSPE Opto – mechatronics Symposium 2024

Theme: Opto-mechatronics meets Electron Optics


About this event

Following up on earlier successful editions, we are organizing the 6th edition of the DSPE Symposium on Opto-mechatronics for October 8, 2024 at Mikrocentrum in Veldhoven.

Opto-mechatronics is used in a wide variety of optical systems. In the previous editions, the focus of the Opto-mechatronics symposium was mainly on optical systems using light, such as optical microscopes and optical lithography systems based on light sources, mirrors and lenses.

In this edition, we want to focus on systems based on electron beam and ion beam optics. These  complex opto-mechatronics systems with great resolving power, are used in multiple applications, like electron-microscopes, electron or ion beam lithography systems and tools for pico-meter level ion beam figuring.

All the information about this event you can find here DSPE Symposium 2024 – DSPE.

Please contact us for any further questions info@dspe.nl

The organizing committee DSPE Opto-mechatronics Symposium:

Cor Ottens, Pieter Kappelhof, Stefan Bäumer, Hans Vermeulen, Nandini Bhattacharya, Julie van Stiphout

 


8 October 2024


The Netherlands

Mikrocentrum, de Run 1115 Veldhoven


References

Lunch Lecture April hosted by…

Theme: Concept optimization of system dynamics of a wafer metrology tool

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Historical view on determinism and…

Paralleling the historical beginnings of modern science, assessing and addressing variation in physical systems constitutes the foundation of precision engineering. Tycho Brahe gave us the measurement data to analyse the heavens.

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Sensor for picometer-scale positioning in…

As technology reaches the atomic and quantum scale, sub-nanometer motion control is no longer optional – it is a necessity, often in vacuum environments where even the smallest disturbances are effectively suppressed.

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References

Lunch Lecture April hosted by…

Theme: Concept optimization of system dynamics of a wafer metrology tool

Read more
Historical view on determinism and…

Paralleling the historical beginnings of modern science, assessing and addressing variation in physical systems constitutes the foundation of precision engineering. Tycho Brahe gave us the measurement data to analyse the heavens.

Read more
Sensor for picometer-scale positioning in…

As technology reaches the atomic and quantum scale, sub-nanometer motion control is no longer optional – it is a necessity, often in vacuum environments where even the smallest disturbances are effectively suppressed.

Read more