EVENT 7 February 2023

Lunch Lecture March 6 hosted by ASML

Bayesian Networks for automated root cause detection in mechatronic systems


About this event

High-tech mechatronic systems can be complex to diagnose, requiring expert knowledge of the system. The complexity lies in the dynamic behavior and the fact that components interact both mechanically and via digital control loops. In this presentation, a method to capture this knowledge and use it for automated reasoning is explained. This is done using a Bayesian Network, who’s properties also enable modelling uncertainty. A tool has been created in which the network can be run, and a case will be shown.

The speaker will be: Jimmy van Schoubroeck, researcher at the Mechatronics and Control research group, ASML.

This lecture (only for members of the DSPE) will start at 12:02pm on March 6 2023 (Teams digital)

Please send an email to info@dspe.nl if you are interested in this Lunch lecture.


6 March 2023


The Netherlands

Digital


References

Lunch Lecture April hosted by…

Theme: Concept optimization of system dynamics of a wafer metrology tool

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Historical view on determinism and…

Paralleling the historical beginnings of modern science, assessing and addressing variation in physical systems constitutes the foundation of precision engineering. Tycho Brahe gave us the measurement data to analyse the heavens.

Read more
Sensor for picometer-scale positioning in…

As technology reaches the atomic and quantum scale, sub-nanometer motion control is no longer optional – it is a necessity, often in vacuum environments where even the smallest disturbances are effectively suppressed.

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References

Lunch Lecture April hosted by…

Theme: Concept optimization of system dynamics of a wafer metrology tool

Read more
Historical view on determinism and…

Paralleling the historical beginnings of modern science, assessing and addressing variation in physical systems constitutes the foundation of precision engineering. Tycho Brahe gave us the measurement data to analyse the heavens.

Read more
Sensor for picometer-scale positioning in…

As technology reaches the atomic and quantum scale, sub-nanometer motion control is no longer optional – it is a necessity, often in vacuum environments where even the smallest disturbances are effectively suppressed.

Read more