EVENT 13 January 2023

Lunch lecture February hosted by KNS Liteq

Design, Integration and Calibration of a Wafer Edge Protection Module in Lithographic Equipment


About this event

The LITEQ500 is a lithographic tool dedicated to the Advanced Packaging process. In addition to the main system functions to expose patterns on a wafer, other dedicated wafer edge processing functionalities have been developed. These wafer edge processing modules are typically used to create a circular pattern on the outer circumference of the wafer. This pattern enables an electrical contact on the edge of the wafer that is needed in the plating process to grow copper on the wafer surface.

The speakers will be:

  • Jeroen de Boeij, System Architect / R&D manager, KNS Liteq
  • Peter van der Krieken, Application Engineer, KNS Liteq

This teams meeting will start at 12:02pm on February 6 2023

Please send an email to info@dspe.nl if you are interested in this Lunch lecture.


6 February 2023


The Netherlands



References

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References

Professional education program (Microcredentials)

The aim of the DSPE professional education program is to equip professionals with the specialized knowledge, skills, and competencies needed to design and realize innovative (high tech) systems.

Read more
Techcafé met als thema Manufacturability

Dé plek om ongedwongen nieuwe contacten op te doen én onder het genot van een borrel en bitterbal te sparren over tech onderwerpen.

Read more
Marriage of opto-mechatronics and electron…

This year’s DSPE Opto-Mechatronics Symposium attracted some 100 participants from academia and industry, all of whom seized the opportunity for networking, meeting technical peers, and visiting an interesting small-scale exhibition.

Read more