EVENT 13 January 2023
Lunch lecture February hosted by KNS Liteq
Design, Integration and Calibration of a Wafer Edge Protection Module in Lithographic Equipment
About this event
The LITEQ500 is a lithographic tool dedicated to the Advanced Packaging process. In addition to the main system functions to expose patterns on a wafer, other dedicated wafer edge processing functionalities have been developed. These wafer edge processing modules are typically used to create a circular pattern on the outer circumference of the wafer. This pattern enables an electrical contact on the edge of the wafer that is needed in the plating process to grow copper on the wafer surface.
The speakers will be:
- Jeroen de Boeij, System Architect / R&D manager, KNS Liteq
- Peter van der Krieken, Application Engineer, KNS Liteq
This teams meeting will start at 12:02pm on February 6 2023
Please send an email to info@dspe.nl if you are interested in this Lunch lecture.
The Netherlands
References ...
DSPE Opto-Mechatronics Symposium 2026
The seventh edition of the DSPE Opto-Mechatronics Symposium will take place on 8 October 2026
Read more
Intellectual property for engineers
Engineers working in high-tech solve complex technical problems every day. New algorithms, control strategies, hardware architectures, production methods and software tools are constantly being developed inside engineering teams.
Read more
Analysing the shock resistance of medical devices
Medical devices are often mounted on mobile trolleys and must survive shocks during transport, handling and everyday use, such as the sudden impact when a wheel hits a doorstep – a shocking encounter.
Read more