EVENT 13 January 2023

Lunch lecture February hosted by KNS Liteq

Design, Integration and Calibration of a Wafer Edge Protection Module in Lithographic Equipment


About this event

The LITEQ500 is a lithographic tool dedicated to the Advanced Packaging process. In addition to the main system functions to expose patterns on a wafer, other dedicated wafer edge processing functionalities have been developed. These wafer edge processing modules are typically used to create a circular pattern on the outer circumference of the wafer. This pattern enables an electrical contact on the edge of the wafer that is needed in the plating process to grow copper on the wafer surface.

The speakers will be:

  • Jeroen de Boeij, System Architect / R&D manager, KNS Liteq
  • Peter van der Krieken, Application Engineer, KNS Liteq

This teams meeting will start at 12:02pm on February 6 2023

Please send an email to info@dspe.nl if you are interested in this Lunch lecture.


6 February 2023


The Netherlands



References

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References

Lunch Lecture June hosted by…

Titel: Modular Reduction of Large-Scale Assembly Models

Read more
DSPE Conference 2025

In 2025, the DSPE Conference on Precision Mechatronics will take place on 23-24 September. Once again, the stage will be set in hotel De Ruwenberg in Sint-Michielsgestel (NL), which at previous DSPE conferences provided an inspiring and relaxed atmosphere for…

Read more
YPN company visit at Differ

On june 11 YPN will organize a company visit again. Don’t hesitate. Start working on your technical knowledge and network with the Young Precision Network now!

Read more