EUSPEN Micro/Nano Manufacturing Workshop
The emergence of products based on micro and nano technology has increased during the last two decades. The first commercially available products of these...
About this event
The emergence of products based on micro and nano technology has increased during the last two decades.
The first commercially available products of these types were based on the VLSI technology and are usually referred to as micro electro-mechanical systems (MEMS) or nano electro-mechanical systems (NEMS). An increase in the push of products based on other materials such as metals, polymers and ceramics is significant, so many efforts are focused towards this area, usually referred to as micro/nano manufacturing. Micro/nano manufacturing is recognized as a key element in bridging the gap between the nano and macro worlds.
More information about the program via http://www.euspen.eu/OurEvents/MicroNano2015.aspx
References
Theme: Concept optimization of system dynamics of a lithography tool.
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Paralleling the historical beginnings of modern science, assessing and addressing variation in physical systems constitutes the foundation of precision engineering. Tycho Brahe gave us the measurement data to analyse the heavens.
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As technology reaches the atomic and quantum scale, sub-nanometer motion control is no longer optional – it is a necessity, often in vacuum environments where even the smallest disturbances are effectively suppressed.
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