Plane mirror interferometers are commonly used to measure displacements of high-precision stages as they can measure with nm-uncertainty over a long stroke. For low measurement uncertainty, target mirrors are mounted directly to the point of interest. Current interferometers are limited to a +/-1 mrad angular range and therefore displacement measurement of an XY-Rz stage requires stacking of stages and measurement systems, increasing moving mass and measurement uncertainty. A beam steering interferometer can achieve a +/-20 mrad angular range, without an increase in measurement head size or measurement uncertainty.

In this talk I will explain the optical layout, measurement uncertainty calculations, controller architecture and share results of the first demonstrator.

Spreker: Kevin Looman

Company: PhD student at TU/e & Prodrive Technologies

Date: September 8 2025

Time: 12:02pm                                                                                                                  

Location: Teams

Please send an email to info@dspe.nl if you are interested in following this lecture.

Normally every first monday of the month DSPE organizes for their members a lunch lecture. Each time there is a different topic that a speaker is going to talk about. Due to the holiday period we will organize this lecture in the second week.

Questions can be asked after the 25 minutes presentation. If you want to keep informed about these lunch lectures please send an email to info@dspe.nl