Program DSPE Conference 2025
Tuesday September 23
Morning session
Chairman: Marc Vermeulen
| 09.30 | Arrival and coffee | |
| 10.00 | ![]() | Welcome by Marc Vermeulen, Mechanical System Architect ASML and conference chair |
| 10.10 | ![]() | AI in the precision mechatronics: who’s at the wheel Precision mechanics is at the heart of the next industrial revolution. With the rise of automation, robotics, and AI, the sector is evolving faster than ever — not just in how we make things, but in how we work, collaborate, and innovate. Industry 4.0 envisions highly automated, data-driven production lines where machines operate with minimal human intervention. But what happens when Artificial Intelligence reaches beyond the factory floor into engineering, planning, and design? Tools like ChatGPT and AI-driven CAD systems are already transforming how knowledge is applied — accelerating workflows while also raising fundamental questions about which roles remain essential. In his keynote, Carlo van de Weijer explores how automation and AI are reshaping the future of work in high-tech manufacturing. He provides clear, thought-provoking insights into which jobs are likely to remain, which may disappear, and how leadership must evolve to stay ahead in an environment that is changing faster than ever.
Carlo van de Weijer, General Manager Eindhoven AI Systems Institute TU Eindhoven |
| 10.55 | Break | |
| 11.15 | ![]() ![]() | Applying AI in high-tech industry – beyond the hype In this keynote we want to go beyond the AI hype and share some of our experiences in applying AI and Machine Learning to industry challenges. With a rich and diverse application portfolio in Applied AI build up in the past 10 years, we strongly believe in the power of AI/ML and data-driven techniques. But in our experience, AI/ML is not the silver bullet for every challenge and it is also not a simple off-the-shelf procedure of throwing in your data and collecting the answers. Solving specific industry challenges starts from a very good understanding of the application domain, often with very specific constraints, as well as a smart use of the available data and its quality. From there it is true engineering to develop a solution that does the job.
In this talk we share our practitioner’s view of applying AI – and in a broader sense mathematics – to industry. Showcasing some of our partnership developments with ASML, TFS, and NXP, we will present an overview of various industrial applications of AI, ranging from real-time inline metrology for semicon, to analyzing complex cell and tissue images for bio sciences, and applying sensor fusion techniques for robust detection in automotive. We will also zoom in on the recurring theme of having limited data and how to deal with this, e.g. by using synthetic data or leveraging foundation models. In addition, we will highlight the importance of combining domain/prior knowledge with AI/ML to arrive at better solutions, e.g. through Bayesian machine learning or physics-informed machine learning. Robbert van Herpen, Business Unit Manager ‘Applied Mathematics & AI’, Sioux Technologies Mark van den Broek, Technology Manager ‘Data Science and Machine Learning’, Sioux Technologies |
| 12.00 | Plenary introduction of demonstrations & posters | |
| 12.30 | Lunch/ Visit to demonstrations & posters |
Afternoon sessions
Chairman: Arend-Jan Beltman
Manager Mechatronics & Program Manager BL Systems at Sioux Technologies
SESSION 1 System Design – 1
| 14.10 | ![]() | A new mechatronic approach to printbelt handling in single pass inkjet printing Sjirk Koekebakker, Canon |
| 14.30 | ![]() | Control of critical conditions enabling new and re-used factories for next generation chip manufacturing Bernhard Bakker, Mecal |
| 14.50 | ![]() | Design Principles for Ultimate Mechanical Stability Robin Trines, Janssen Precision Engineering + DEMO in Foyer |
| 15.10 | Break / Visit to demonstrations & posters |
SESSION 2 Machine Learning
| 15.40 | ![]() ![]() | Approximating model-predictive controllers using neural networks: validation on a mechatronic system Jeroen Willems, Nobleo and Edward Kikken, Flanders Make |
| 16.00 | ![]() | Automatic feedforward structure selection via sparse learning in control Tjeerd Ickenroth, Eindhoven University of Technology / Canon |
| 16.20 | ![]() | Automated wafer inspection with machine learning Stefan van der Palen, Nobleo + DEMO in Foyer |
| 16.40 | Break / Visit to demonstrations & posters |
SESSION 3 Modelling and Control
| 17.40 | ![]() | Follow the line – A system model approach Ivan Smits, Canon |
| 18.00 | ![]() | Leveraging Non-Minimum-Phase Property for Active Damping Control of Nanopositioning Systems Aditya Natu, Delft University of Technology + DEMO in Foyer |
| 18.20 | ![]() | Model order reduction for waterline acoustics Luuk Poort, MI Partners |
| 18.40 | End of first conference day. Time for Beers | |
| 19.15 | Dinner and social event |
Wednesday September 24
Morning sessions
Chairman: Richard van de Sande
System Architect Mechanical Development ASML
| 08.30 | ![]() | Learning the language of nature: the journey of Generative AI for electron microscopy applications We know that generative AI can produce language, but can it help to produce nanoscale insights? In this presentation, we will introduce Thermo Fisher Scientific and its electron microscopes that are being used in life science, material science and semiconductor applications. We will take a look at the various ways that Generative AI, beyond large language models, is being used to learn and understand ‘’the language of nature’’. We’ll delve into specific case studies using these technologies, showcasing how Thermo Fisher Scientific leverages AI in general and Generative AI in particular to bring a new perspective to applications and operation of electron microscopes.
Remco Schoenmakers, Sr Director R&D and AI Strategy lead Thermo Fisher Scientific |
| 09.20 | Break / Visit to demonstrations & posters |
SESSION 4 Precision Mechanics
| 09.40 | ![]() | Accurate 1-DoF flexure guide for a high sensitivity, low frequency, low noise seismometer for Einstein Telescope Hans ‘d Achard, STTLS / Fontys / University of Twente + DEMO in Foyer |
| 10.00 | ![]() | Kinematic Synthesis of Fully Decoupled Planar Parallel Mechanisms Kaan Yaşır, Delft University of Technology / TBRM |
| 10.20 | ![]() | Internal stresses in elastic elements Nico Tan, NTS Group |
| 10.40 | Break / Visit to demonstrations & posters |
SESSION 5 Piezo Electric Actuation
| 11.00 | ![]() | Piezoelectric damping of a 6-DoF vibration isolation frame Ruben Buitenhuis, Demcon / University of Twente + DEMO in Foyer |
| 11.20 | ![]() | Prototype development of a Deformable Wafer Table Bas Huisman, Eindhoven University of Technology / ASML + DEMO in Foyer |
| 11.40 | ![]() | Active deformation of a large solid plate to control defined surface shapes Kolja Zoller, Physik Instrumente (PI) + DEMO in Foyer |
| 12.00 | Lunch / Visit to demonstrations & posters |
Afternoon sessions
Chairman: Kees Verbaan
System Architect NTS Systems Development
SESSION 6 Energy Efficiency
| 14.00 | ![]() ![]() | Wafer Stage Long Stroke Setpoint Optimization Sjoerd Huiberts, ASML and Lense Swaenen, Sioux |
| 14.20 | ![]() | Boosting the actuator efficiency of reluctance actuators with permanent magnets Marielle Meijer, Demcon |
| 14.40 | ![]() | Bouncing 2D stage Andre Ramos, ASML |
| 15.00 | Break / Visit to demonstrations & posters |
SESSION 7 System Design-2
| 15.20 |
| Reluctance based steering mirror with linear current-force relation and stiffness compensation: design and realisation Kevin Looman, Eindhoven University of Technology / Prodrive |
| 15.40 | ![]() | Experimental results of piezo self-sensing damping control Hebert Prattama, ASML |
| 16.00 | ![]() | AXYT: Accelerated XY Table Ronald Plak, Sioux + DEMO in Foyer |
| 16.20 | Break / Visit to demonstrations & posters | |
| 16.30 | ![]() | Best contribution award & closing by Jan van den Brink, Director Frencken Engineering |
Posters / Demonstrations
| Brainport Industries, Ceratec, Tue, Siemens | Mark van Lieshout | Data Driven Manufacturing: Adaptive Machining |
| ASML | Erwin Mulder | Automated Flexure Design and Optimization Tool DEEPFLEX (Demonstration) |
| ASML | Krijn Bustraan | High Force Low Energy Linear Iron-Core Motor for Faster Stages (Demonstration) |
| ASML, TNO | Dieter Lambregts | The Fast Steering Mirror, a small device that enables a big leap in EUV power in 1um Source Systems |
| Sioux, Eindhoven University of Technology | Lennart Blanken | Position-dependent feedforward control for the AXYT (Demonstration) |
| Sioux | Rogier Wildeboer en Lense Swaenen | Re-usable building blocks for calibration and alignment (Demonstration) |
| ASML, Eindhoven University of Technology | Ruud Beerens en Thijs van Keulen | Recursive Learning of Feedforward Control Parameters |
| Unseq | Jan-Pieter Rijstenbil | Automated placement of micronuts for laser spot welding |
| ASML, Viro | Bas Jansen | Piezoelectric transducer models: a comprehensive overview |
| Mathworks | Tadele Shiferaw, Paola Jaramillo | Efficiency and Precision with AI-driven Robotic Manipulators (Demonstration) |
| TNO | Gert Witvoet | In-Orbit Demonstration of Free-Space Optical communication from a compact CubeSat-compatible terminal to a ground station |
| ASML | Victor Dolk | Tackling computational complexity of dynamical models of next-generation lithography systems |
| VSL | Walter Knulst | Recent developments in fiber-based interferometers for low noise vibrational and rotational sensing (Demonstration) |
| Physik Instrumente (PI) | Daniel Geissler | Reduced Order Model of a Magnetic Levitation Planar Motion Stage |
| ITEC | Martin Vermeer | Pushing the Chip-Bonding SustAInability boundaries: An ultra-efficient, cost-effective Wafer-Stage Solution (Demonstration) |
| ASML | Ricardo Malagodi Caliari | Piezo actuators sensing machine dynamics |
| Brazilian Center for Research in Energy and Materials (CNPEM) | Vinicius Falchetto | SAPOTI – A Precision-Mechatronic Cryogenic Nanoprobe for Synchrotron X-ray Imaging |
| Brazilian Center for Research in Energy and Materials (CNPEM) | Renan Geraldes | The Design of a BSL4-compatible Cryogenic Soft X-ray Tomography Microscope at Sirius Light Source |


























