Program DSPE Conference 2025

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Tuesday September 23

Morning session

Chairman: Marc Vermeulen

09.30Arrival and coffee
10.00Welcome by Marc Vermeulen,
Mechanical System Architect ASML and conference chair
10.10AI in the precision mechatronics: who’s at the wheel
 
Precision mechanics is at the heart of the next industrial revolution. With the rise of automation, robotics, and AI, the sector is evolving faster than ever — not just in how we make things, but in how we work, collaborate, and innovate. Industry 4.0 envisions highly automated, data-driven production lines where machines operate with minimal human intervention.
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Carlo van de Weijer, General Manager Eindhoven AI Systems Institute TU Eindhoven
 
10.55Break
11.15Applying AI in high-tech industry – beyond the hype

In this keynote we want to go beyond the AI hype and share some of our experiences in applying AI and Machine Learning to industry challenges. With a rich and diverse application portfolio in Applied AI build up in the past 10 years, we strongly believe in the power of AI/ML and data-driven techniques.
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Robbert van Herpen, Business Unit Manager ‘Applied Mathematics & AI’, Sioux Technologies
Mark van den Broek, Technology Manager ‘Data Science and Machine Learning’, Sioux Technologies
12.00Plenary introduction of demonstrations & posters
12.30Lunch/ Visit to demonstrations & posters

Afternoon sessions

Chairman: Arend-Jan Beltman

Manager Mechatronics & Program Manager BL Systems at Sioux Technologies

SESSION 1 System Design – 1 

14.10A new mechatronic approach to printbelt handling in single pass inkjet printing
Sjirk Koekebakker, Canon
14.30Control of critical conditions enabling new and re-used factories for next generation chip manufacturing 
Bernhard Bakker, Mecal
14.50Design Principles for Ultimate Mechanical Stability  
Robin Trines, Janssen Precision Engineering
+ DEMO in Foyer
15.10 Break / Visit to demonstrations & posters

SESSION 2 Machine Learning

15.40
Approximating model-predictive controllers using neural networks: validation on a mechatronic system
Jeroen Willems, Nobleo and Edward Kikken, Flanders Make
16.00Automatic feedforward structure selection via sparse learning in control
Tjeerd Ickenroth, Eindhoven University of Technology / Canon
16.20Automated wafer inspection with machine learning  
Stefan van der Palen, Nobleo
+ DEMO in Foyer
16.40 Break / Visit to demonstrations & posters

SESSION 3 Modelling and Control     

17.40Follow the line – A system model approach
Ivan Smits, Canon
18.00
Leveraging Non-Minimum-Phase Property for Active Damping Control of Nanopositioning Systems
Aditya Natu, Delft University of Technology
+ DEMO in Foyer
18.20Model order reduction for waterline acoustics
Luuk Poort, MI Partners
18.40 End of first conference day. Time for Beers
19.15Dinner and social event

Wednesday September 24


Morning sessions

Chairman: Richard van de Sande

System Architect Mechanical Development ASML

08.30Learning the language of nature: the journey of Generative AI for electron microscopy applications

We know that generative AI can produce language, but can it help to produce nanoscale insights? In this presentation, we will introduce Thermo Fisher Scientific and its electron microscopes that are being used in life science, material science and semiconductor applications.
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Remco Schoenmakers, Sr Director R&D  and AI Strategy lead Thermo Fisher Scientific
09.20 Break / Visit to demonstrations & posters

SESSION 4 Precision Mechanics

09.40
Accurate 1-DoF flexure guide for a high sensitivity, low frequency, low noise seismometer for Einstein Telescope
Hans ‘d Achard, STTLS / Fontys / University of Twente
+ DEMO in Foyer
10.00Kinematic Synthesis of Fully Decoupled Planar Parallel Mechanisms
Kaan Yaşır, Delft University of Technology / TBRM
10.20Internal stresses in elastic elements
Nico Tan, NTS Group
10.40 Break / Visit to demonstrations & posters

SESSION 5 Piezo Electric Actuation

11.00
Piezoelectric damping of a 6-DoF vibration isolation frame
Ruben Buitenhuis, Demcon / University of Twente
+ DEMO in Foyer
11.20Prototype development of a Deformable Wafer Table  
Bas Huisman, Eindhoven University of Technology / ASML
+ DEMO in Foyer
11.40Active deformation of a large solid plate to control defined surface shapes
Kolja Zoller, Physik Instrumente (PI)
+ DEMO in Foyer
12.00 Lunch / Visit to demonstrations & posters

Afternoon sessions

Chairman: Kees Verbaan

System Architect NTS Systems Development

SESSION 6 Energy Efficiency      

14.00
Wafer Stage Long Stroke Setpoint Optimization
Sjoerd Huiberts, ASML and Lense Swaenen, Sioux
14.20Boosting the actuator efficiency of reluctance actuators with permanent magnets
Marielle Meijer, Demcon
14.40Bouncing 2D stage
Andre Ramos, ASML
15.00 Break / Visit to demonstrations & posters

SESSION 7 System Design-2

15.20 Reluctance based steering mirror with linear current-force relation and stiffness compensation: design and realisation  
Kevin Looman, Eindhoven University of Technology / Prodrive
15.40Experimental results of piezo self-sensing damping control
Hebert Prattama, ASML
16.00AXYT: Accelerated XY Table
Ronald Plak, Sioux
+ DEMO in Foyer
16.20 Break / Visit to demonstrations & posters
16.30Best contribution award & closing by Jan van den Brink, Director Frencken Engineering

Posters / Demonstrations

Brainport Industries, Ceratec, Tue, SiemensMark van LieshoutData Driven Manufacturing: Adaptive Machining
ASMLErwin MulderAutomated Flexure Design and Optimization Tool DEEPFLEX (Demonstration)
ASMLKrijn BustraanHigh Force Low Energy Linear Iron-Core Motor for Faster Stages (Demonstration)
ASML, TNODieter LambregtsThe Fast Steering Mirror, a small device that enables a big leap in EUV power in 1um Source Systems
Sioux, Eindhoven University of TechnologyLennart BlankenPosition-dependent feedforward control for the AXYT (Demonstration)
SiouxRogier Wildeboer en Lense SwaenenRe-usable building blocks for calibration and alignment (Demonstration)
ASML, Eindhoven University of TechnologyRuud Beerens en Thijs van KeulenRecursive Learning of Feedforward Control Parameters
UnseqJan-Pieter RijstenbilAutomated placement of micronuts for laser spot welding
ASML, ViroBas JansenPiezoelectric transducer models: a comprehensive overview
MathworksTadele Shiferaw, Paola JaramilloEfficiency and Precision with AI-driven Robotic Manipulators (Demonstration)
TNOGert WitvoetIn-Orbit Demonstration of Free-Space Optical communication from a compact CubeSat-compatible terminal to a ground station
ASMLVictor DolkTackling computational complexity of dynamical models of next-generation lithography systems
VSLWalter KnulstRecent developments in fiber-based interferometers for low noise vibrational and rotational sensing (Demonstration)
Physik Instrumente (PI)Daniel GeisslerReduced Order Model of a Magnetic Levitation Planar Motion Stage
ITECMartin VermeerPushing the Chip-Bonding SustAInability boundaries: An ultra-efficient, cost-effective Wafer-Stage Solution (Demonstration)
ASMLRicardo Malagodi CaliariPiezo actuators sensing machine dynamics  
Brazilian Center for Research in Energy and Materials (CNPEM)Vinicius FalchettoSAPOTI – A Precision-Mechatronic Cryogenic Nanoprobe for Synchrotron X-ray Imaging
Brazilian Center for Research in Energy and Materials (CNPEM)Renan GeraldesThe Design of a BSL4-compatible Cryogenic Soft X-ray Tomography Microscope at Sirius Light Source