Program DSPE Conference 2025
Tuesday September 23
Morning session
Chairman: Marc Vermeulen
| 09.30 | Arrival and coffee | |
| 10.00 | | Welcome by Marc Vermeulen, Mechanical System Architect ASML and conference chair |
| 10.10 |  | GUESTSPEAKER (to be announced) |
| 10.55 | Break | |
| 11.15 |   | Applying AI in high-tech industry – beyond the hype In this keynote we want to go beyond the AI hype and share some of our experiences in applying AI and Machine Learning to industry challenges. With a rich and diverse application portfolio in Applied AI build up in the past 10 years, we strongly believe in the power of AI/ML and data-driven techniques. But in our experience, AI/ML is not the silver bullet for every challenge and it is also not a simple off-the-shelf procedure of throwing in your data and collecting the answers. Solving specific industry challenges starts from a very good understanding of the application domain, often with very specific constraints, as well as a smart use of the available data and its quality. From there it is true engineering to develop a solution that does the job.
In this talk we share our practitioner’s view of applying AI – and in a broader sense mathematics – to industry. Showcasing some of our partnership developments with ASML, TFS, and NXP, we will present an overview of various industrial applications of AI, ranging from real-time inline metrology for semicon, to analyzing complex cell and tissue images for bio sciences, and applying sensor fusion techniques for robust detection in automotive. We will also zoom in on the recurring theme of having limited data and how to deal with this, e.g. by using synthetic data or leveraging foundation models. In addition, we will highlight the importance of combining domain/prior knowledge with AI/ML to arrive at better solutions, e.g. through Bayesian machine learning or physics-informed machine learning. Robbert van Herpen: Business Unit Manager ‘Applied Mathematics & AI’ Mark van den Broek: Technology Manager ‘Data Science and Machine Learning’ |
| 12.00 | Plenary introduction of demonstrations & posters | |
| 12.30 | Lunch/ Visit to demonstrations & posters |
Afternoon sessions
Chairman: Arend-Jan Beltman
Manager Mechatronics & Program Manager BL Systems at Sioux Technologies
SESSION 1 System Design – 1
| 14.10 |  | A new mechatronic approach to printbelt handling in single pass inkjet printing Sjirk Koekebakker, Canon |
| 14.30 |  | Control of critical conditions enabling new and re-used factories for next generation chip manufacturing Bernhard Bakker, Mecal |
| 14.50 |  | Demonstration Design Principles for Ultimate Mechanical Stability Robin Trines, Janssen Precision Engineering |
| 15.10 | Break / Visit to demonstrations & posters |
SESSION 2 Machine Learning
| 15.40 |   | Approximating model-predictive controllers using neural networks: validation on a mechatronic system Jeroen Willems, Nobleo and Edward Kikken, Flanders Make |
| 16.00 |  | Automatic feedforward structure selection via sparse learning in control Tjeerd Ickenroth, Eindhoven University of Technology / Canon |
| 16.20 |  | Demonstration Automated wafer inspection with machine learning Rik Wetzels, Nobleo |
| 16.40 | Break / Visit to demonstrations & posters |
SESSION 3 Modelling and Control
| 17.40 |  | Follow the line – A system model approach Ivan Smits, Canon |
| 18.00 |  | Demonstration Leveraging Non-Minimum-Phase Property for Active Damping Control of Nanopositioning Systems Aditya Natu, Delft University of Technology |
| 18.20 |  | Model order reduction for waterline acoustics Dick Laro, MI Partners |
| 18.40 | End of first conference day. Time for Beers | |
| 19.15 | Dinner and social event |
Wednesday September 24
Morning sessions
Chairman: Richard van de Sande
System Architect Mechanical Development ASML
| 08.30 | | GUESTSPEAKER (to be announced) |
| 09.20 | Break / Visit to demonstrations & posters |
SESSION 4 Precision Mechanics
| 09.40 |  | Demonstration Accurate 1-DoF flexure guide for a high sensitivity, low frequency, low noise seismometer for Einstein Telescope Hans ‘d Achard, STTLS / Fontys / University of Twente |
| 10.00 |  | Kinematic Synthesis of Fully Decoupled Planar Parallel Mechanisms Kaan Yaşır, Delft University of Technology / TBRM |
| 10.20 |  | Internal stresses in elastic elements Nico Tan, NTS Group |
| 10.40 | Break / Visit to demonstrations & posters |
SESSION 5 Piezo Electric Actuation
| 11.00 |  | Piezoelectric damping of a 6-DoF vibration isolation frame Ruben Buitenhuis, Demcon / University of Twente |
| 11.20 |  | Demonstation Prototype development of a Deformable Wafer Table Bas Huisman, Eindhoven University of Technology / ASML |
| 11.40 |  | Active deformation of a large solid plate to control defined surface shapes Kolja Zoller, Physik Instrumente (PI) |
| 12.00 | Lunch / Visit to demonstrations & posters |
Afternoon sessions
Chairman: Kees Verbaan
System Architect NTS Systems Development
SESSION 6 Energy Efficiency
| 14.00 |   | Wafer Stage Long Stroke Setpoint Optimization Sjoerd Huiberts, ASML and Lense Swaenen, Sioux |
| 14.20 |  | Boosting the actuator efficiency of reluctance actuators with permanent magnets Marielle Meijer, Demcon |
| 14.40 |  | Bouncing 2D stage Andre Ramos, ASML |
| 15.00 | Break / Visit to demonstrations & posters |
SESSION 7 System Design-2
| 15.20 | 
| Reluctance based steering mirror with linear current-force relation and stiffness compensation: design and realisation Kevin Looman, Eindhoven University of Technology / Prodrive |
| 15.40 |  | Experimental results of piezo self-sensing damping control Bas Jansen, ASML |
| 16.00 |  | AXYT: Accelerated XY Table Roland Plak, Sioux |
| 16.20 | Break / Visit to demonstrations & posters | |
| 16.30 |  | Best contribution award & closing by Jan van den Brink, Director Frencken Engineering |
Posters / Demonstrations
| Brainport Industries, Ceratec, Tue, Siemens | Mark van Lieshout | Data Driven Manufacturing: Adaptive Machining |
| ASML | Erwin Mulder | Automated Flexure Design and Optimization Tool DEEPFLEX |
| ASML | Krijn Bustraan | High Force Low Energy Linear Iron-Core Motor for Faster Stages |
| ASML, TNO | Dieter Lambregts | The Fast Steering Mirror, a small device that enables a big leap in EUV power in 1um Source Systems |
| Sioux, Eindhoven University of Technology | Lennart Blanken | Position-dependent feedforward control for the AXYT |
| Sioux | Rogier Wildeboer en Lenze Swaenen | Re-usable building blocks for calibration and alignment |
| ASML, Eindhoven University of Technology | Ruud Beerens en Thijs van Keulen | Recursive Learning of Feedforward Control Parameters |
| Unseq | Jan-Pieter Rijstenbil | Automated placement of micronuts for laser spot welding |
| ASML, Viro | Bas Jansen | Piezoelectric transducer models: a comprehensive overview |
| Mathworks | Tadele Shiferaw, Paola Jaramillo | Efficiency and Precision with AI-driven Robotic Manipulators |
| TNO | Gert Witvoet | In-Orbit Demonstration of Free-Space Optical communication from a compact CubeSat-compatible terminal to a ground station |
| ASML | Victor Dolk | Tackling computational complexity of dynamical models of next-generation lithography systems |
| VSL | Walter Knulst | Recent developments in fiber-based interferometers for low noise vibrational and rotational sensing |
| Physik Instrumente (PI) | Daniel Geissler | Reduced Order Model of a Magnetic Levitation Planar Motion Stage |
| ITEC | Martin Vermeer | Pushing the Chip-Bonding SustAInability boundaries: An ultra-efficient, cost-effective Wafer-Stage Solution |
| ASML | Ricardo Malagodi Caliari | Piezo actuators sensing machine dynamics |
| Brazilian Center for Research in Energy and Materials (CNPEM) | Vinicius Falchetto | SAPOTI – A Precision-Mechatronic Cryogenic Nanoprobe for Synchrotron X-ray Imaging |
| Brazilian Center for Research in Energy and Materials (CNPEM) | Renan Geraldes | The Design of a BSL4-compatible Cryogenic Soft X-ray Tomography Microscope at Sirius Light Source |