Mechtronic design of a lens manipulator

Dit artikel gaat in op oplossingen voor manipulatoren met hoge nauwkeurigheid die wel in serieproducite genomen kunnen worden en daardoor niet erg duur worden, Een voorbeeld wordt gegeven van een lens manipulator met hoge nauwkeurigheid die is ontworpen zonder exotische componenten.

Download Mikroniek 5-2003

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References

Lunch Lecture April hosted by…

Theme: Concept optimization of system dynamics of a lithography tool.

Historical view on determinism and…

Paralleling the historical beginnings of modern science, assessing and addressing variation in physical systems constitutes the foundation of precision engineering. Tycho Brahe gave us the measurement data to analyse the heavens.

Sensor for picometer-scale positioning in…

As technology reaches the atomic and quantum scale, sub-nanometer motion control is no longer optional – it is a necessity, often in vacuum environments where even the smallest disturbances are effectively suppressed.