High-resolution capacitive sensor
Jeroen van Schieveen
A new concept has been developed that overcomes alignment problems in high-resolution capacitive sensors. This concept, called ‘thermal stepper’, is based on thermal actuation of clamping elements and allows automation of alignment procedures. A prototype of a self-aligning capacitive sensor head was realised and it was demonstrated to have sub-micrometer positioning accuracy and sub-nanometer long-term clamping stability.