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    • Design Principles for PM

Home DPPM Cases Design for damping

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Design principles

  • Kinematic design
    • 1.1 Balanced Scan stage for in Electron microscope
    • 1.2 Allowable misalignment in an overconstrained flexure mechanism
  • Design for stiffness
    • 2.1 Allowable misalignment in an overconstrained flexure mechanism
  • Lightweight design
  • Design for damping
    • 4.1 Passive damping in semiconductor wafer stages
  • Design for symmetry
  • Design for low friction and hysteresis
    • 6.1 Balanced Scan stage for in Electron microscope
  • Design for low sensitivity
    • 7.1 High-precision 3D coordinate measuring machine according to Abbe and Bryan principle
    • 7.2 Superconducting magnet plate for planar motor application
  • Design for stability
  • Design for load compensation
    • 9.1 Balanced Scan stage for in Electron microscope
  • Design for minimal cost and complexity

 
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