ASML Veldhoven

1 October 2012


ASML Research
Building 7 (reception)
De Run 6501
5504 AH Veldhoven
The Netherlands



13:15 Meet at reception of building 7
Program: tbd



ASML is the largest supplier in the world of photolithography systems for the semiconductor industry. The company manufactures wafer steppers that are used in the production of integrated circuits (ICs), such as DRAM memory, flash memory, and CPUs. As of 2010, ASML has 67 percent of the worldwide sales of lithography machines, with the competition consisting of Ultratech, Canon and Nikon.

Research & developmentThe Twinscan NXT:1950i system is used for producing features down to 32 nanometers (outlook: 22 nm) at up to 200 wafers per hour, using a water immersion lens and an argon fluoride laser that produces light at a wavelength of 193 nm. The average price for an immersion lithography machine is 27 million euros (source: wikipedia).

ASML also manufactures extreme ultraviolet lithography machines that use 13.5 nm wavelength light. On 22 April 2009, the Belgian research center Imec presented the world's first functional 22 nm CMOS SRAM memory cells made using ASML's prototype EUV lithography machine.

Last July, Intel announced to invest $4.1 billion into ASML in exchange for a 15% ownership, in order to speed up the transition from 300 mm to 450 mm wafers and further development of EUV lithography. Also Samsung (503 + 276 million euro) and TSMC (838 + 276 million euro) have invested in the EUV development in exchange for ASML stocks.



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